Evanescent wave interference lithography for surface nano-structuring

10.1088/0031-8949/2007/T129/008

Saved in:

Bibliographic Details
Main Authors:	Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Lukiyanchuk, B.S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70217
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Be the first to leave a comment!

Similar Items