High-k gate stack formation on strained SiGe substrate for MOSFET applications
10.1149/1.2778370
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/70479 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-70479 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-704792015-01-17T04:30:48Z High-k gate stack formation on strained SiGe substrate for MOSFET applications Zhu, C. Li, M.F. Huang, J. Fu, J. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2778370 ECS Transactions 11 6 115-123 2014-06-19T03:12:36Z 2014-06-19T03:12:36Z 2007 Conference Paper Zhu, C.,Li, M.F.,Huang, J.,Fu, J. (2007). High-k gate stack formation on strained SiGe substrate for MOSFET applications. ECS Transactions 11 (6) : 115-123. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.2778370" target="_blank">https://doi.org/10.1149/1.2778370</a> 9781566775724 19385862 http://scholarbank.nus.edu.sg/handle/10635/70479 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
10.1149/1.2778370 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Zhu, C. Li, M.F. Huang, J. Fu, J. |
| format |
Conference or Workshop Item |
| author |
Zhu, C. Li, M.F. Huang, J. Fu, J. |
| spellingShingle |
Zhu, C. Li, M.F. Huang, J. Fu, J. High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| author_sort |
Zhu, C. |
| title |
High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| title_short |
High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| title_full |
High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| title_fullStr |
High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| title_full_unstemmed |
High-k gate stack formation on strained SiGe substrate for MOSFET applications |
| title_sort |
high-k gate stack formation on strained sige substrate for mosfet applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70479 |
| _version_ |
1681087207204454400 |