In-situ measurement and control for photoresist processing in microlithography

In-situ measurement and control for photoresist processing in microlithography

AIChE Annual Meeting, Conference Proceedings

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Main Authors: Tay, A., Ho, W.-K., Wu, X., Kiew, C.-M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microlithography
Photoresist Processing
Semiconductor Manufacturing
Temperature Control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70609
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Institution: National University of Singapore
id sg-nus-scholar.10635-70609
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spelling sg-nus-scholar.10635-706092024-11-14T02:32:27Z In-situ measurement and control for photoresist processing in microlithography Tay, A. Ho, W.-K. Wu, X. Kiew, C.-M. ELECTRICAL & COMPUTER ENGINEERING Microlithography Photoresist Processing Semiconductor Manufacturing Temperature Control AIChE Annual Meeting, Conference Proceedings 7473-7487 2014-06-19T03:14:08Z 2014-06-19T03:14:08Z 2004 Conference Paper Tay, A.,Ho, W.-K.,Wu, X.,Kiew, C.-M. (2004). In-situ measurement and control for photoresist processing in microlithography. AIChE Annual Meeting, Conference Proceedings : 7473-7487. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/70609 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Microlithography
Photoresist Processing
Semiconductor Manufacturing
Temperature Control
spellingShingle Microlithography
Photoresist Processing
Semiconductor Manufacturing
Temperature Control
Tay, A.
Ho, W.-K.
Wu, X.
Kiew, C.-M.
In-situ measurement and control for photoresist processing in microlithography
description AIChE Annual Meeting, Conference Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tay, A.
Ho, W.-K.
Wu, X.
Kiew, C.-M.
format Conference or Workshop Item
author Tay, A.
Ho, W.-K.
Wu, X.
Kiew, C.-M.
author_sort Tay, A.
title In-situ measurement and control for photoresist processing in microlithography
title_short In-situ measurement and control for photoresist processing in microlithography
title_full In-situ measurement and control for photoresist processing in microlithography
title_fullStr In-situ measurement and control for photoresist processing in microlithography
title_full_unstemmed In-situ measurement and control for photoresist processing in microlithography
title_sort in-situ measurement and control for photoresist processing in microlithography
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70609
_version_ 1821223810007826432

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