Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization

Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004

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Main Authors:	Cho, B.J., Poon, D., Tan, L.S., Bhat, M., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71059
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71059
record_format	dspace
spelling	sg-nus-scholar.10635-710592015-03-26T21:20:37Z Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization Cho, B.J. Poon, D. Tan, L.S. Bhat, M. See, A. ELECTRICAL & COMPUTER ENGINEERING Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004 4 22-26 2014-06-19T03:19:22Z 2014-06-19T03:19:22Z 2004 Conference Paper Cho, B.J.,Poon, D.,Tan, L.S.,Bhat, M.,See, A. (2004). Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization. Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004 4 : 22-26. ScholarBank@NUS Repository. 7309039157 http://scholarbank.nus.edu.sg/handle/10635/71059 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Cho, B.J. Poon, D. Tan, L.S. Bhat, M. See, A.
format	Conference or Workshop Item
author	Cho, B.J. Poon, D. Tan, L.S. Bhat, M. See, A.
spellingShingle	Cho, B.J. Poon, D. Tan, L.S. Bhat, M. See, A. Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
author_sort	Cho, B.J.
title	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
title_short	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
title_full	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
title_fullStr	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
title_full_unstemmed	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
title_sort	multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71059
_version_	1681087314416107520

Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization

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