OPC mask simplification using over-designed timing slack of standard cells
10.1117/12.2018921
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sg-nus-scholar.10635-712642023-10-29T22:07:33Z OPC mask simplification using over-designed timing slack of standard cells Qu, Y. Heng, C.H. Tay, A. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING Circuit performance Design for manufacturability (DFM) Mask Optical proximity correction (OPC) Timing slack 10.1117/12.2018921 Proceedings of SPIE - The International Society for Optical Engineering 8764 - PSISD 2014-06-19T03:21:44Z 2014-06-19T03:21:44Z 2013 Conference Paper Qu, Y., Heng, C.H., Tay, A., Lee, T.H. (2013). OPC mask simplification using over-designed timing slack of standard cells. Proceedings of SPIE - The International Society for Optical Engineering 8764 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.2018921 9780819495617 0277786X http://scholarbank.nus.edu.sg/handle/10635/71264 000323576000023 Scopus |
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Asia |
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Singapore Singapore |
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Circuit performance Design for manufacturability (DFM) Mask Optical proximity correction (OPC) Timing slack |
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Circuit performance Design for manufacturability (DFM) Mask Optical proximity correction (OPC) Timing slack Qu, Y. Heng, C.H. Tay, A. Lee, T.H. OPC mask simplification using over-designed timing slack of standard cells |
| description |
10.1117/12.2018921 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Qu, Y. Heng, C.H. Tay, A. Lee, T.H. |
| format |
Conference or Workshop Item |
| author |
Qu, Y. Heng, C.H. Tay, A. Lee, T.H. |
| author_sort |
Qu, Y. |
| title |
OPC mask simplification using over-designed timing slack of standard cells |
| title_short |
OPC mask simplification using over-designed timing slack of standard cells |
| title_full |
OPC mask simplification using over-designed timing slack of standard cells |
| title_fullStr |
OPC mask simplification using over-designed timing slack of standard cells |
| title_full_unstemmed |
OPC mask simplification using over-designed timing slack of standard cells |
| title_sort |
opc mask simplification using over-designed timing slack of standard cells |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71264 |
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1781783197301866496 |