Pulsed laser annealing of ultra-shallow junctions in silicon-germanium

10.1142/S0219581X10006922

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Bibliographic Details
Main Authors:	Tan, L.S., Tan, J.Y., Begum, A., Hong, M.H., Du, A.Y., Bhat, M., Wang, X.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	end-of-range defects Pulsed laser annealing ultra-shallow junction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71526
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71526
record_format	dspace
spelling	sg-nus-scholar.10635-715262023-10-29T22:08:04Z Pulsed laser annealing of ultra-shallow junctions in silicon-germanium Tan, L.S. Tan, J.Y. Begum, A. Hong, M.H. Du, A.Y. Bhat, M. Wang, X.C. ELECTRICAL & COMPUTER ENGINEERING end-of-range defects Pulsed laser annealing ultra-shallow junction 10.1142/S0219581X10006922 International Journal of Nanoscience 9 4 341-344 2014-06-19T03:24:43Z 2014-06-19T03:24:43Z 2010-08 Conference Paper Tan, L.S., Tan, J.Y., Begum, A., Hong, M.H., Du, A.Y., Bhat, M., Wang, X.C. (2010-08). Pulsed laser annealing of ultra-shallow junctions in silicon-germanium. International Journal of Nanoscience 9 (4) : 341-344. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X10006922 0219581X http://scholarbank.nus.edu.sg/handle/10635/71526 000216785500018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	end-of-range defects Pulsed laser annealing ultra-shallow junction
spellingShingle	end-of-range defects Pulsed laser annealing ultra-shallow junction Tan, L.S. Tan, J.Y. Begum, A. Hong, M.H. Du, A.Y. Bhat, M. Wang, X.C. Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
description	10.1142/S0219581X10006922
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, L.S. Tan, J.Y. Begum, A. Hong, M.H. Du, A.Y. Bhat, M. Wang, X.C.
format	Conference or Workshop Item
author	Tan, L.S. Tan, J.Y. Begum, A. Hong, M.H. Du, A.Y. Bhat, M. Wang, X.C.
author_sort	Tan, L.S.
title	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
title_short	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
title_full	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
title_fullStr	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
title_full_unstemmed	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium
title_sort	pulsed laser annealing of ultra-shallow junctions in silicon-germanium
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71526
_version_	1781783208532115456

Pulsed laser annealing of ultra-shallow junctions in silicon-germanium

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