Silicides as new electrode/heater for compact integration of phase change memory with CMOS

• Main Authors: Fang, L.W.-W., Zhao, R., Yeo, E.-G., Lim, K.-G., Yang, H., Shi, L., Chong, T.-C., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71769
• Institution: National University of Singapore

10.1109/VTSA.2010.5488913