Silicides as new electrode/heater for compact integration of phase change memory with CMOS

Silicides as new electrode/heater for compact integration of phase change memory with CMOS

10.1109/VTSA.2010.5488913

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Bibliographic Details
Main Authors:	Fang, L.W.-W., Zhao, R., Yeo, E.-G., Lim, K.-G., Yang, H., Shi, L., Chong, T.-C., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71769
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Institution:	National University of Singapore

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