Silicon beam structures comprising nanophotonics as NEMS sensors

Silicon beam structures comprising nanophotonics as NEMS sensors

10.1109/NEMS.2008.4484333

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Bibliographic Details
Main Authors: Lee, C., Thillaigovindan, J., Radhakrishnan, R., Li, J., Balasubramanian, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Nanophotonics
NEMS
Sensors
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71770
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Institution: National University of Singapore
Description
Summary:10.1109/NEMS.2008.4484333

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