Silicon beam structures comprising nanophotonics as NEMS sensors
10.1109/NEMS.2008.4484333
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2014
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sg-nus-scholar.10635-717702015-02-16T16:33:46Z Silicon beam structures comprising nanophotonics as NEMS sensors Lee, C. Thillaigovindan, J. Radhakrishnan, R. Li, J. Balasubramanian, N. ELECTRICAL & COMPUTER ENGINEERING MEMS Nanophotonics NEMS Sensors 10.1109/NEMS.2008.4484333 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 270-273 2014-06-19T03:27:35Z 2014-06-19T03:27:35Z 2008 Conference Paper Lee, C.,Thillaigovindan, J.,Radhakrishnan, R.,Li, J.,Balasubramanian, N. (2008). Silicon beam structures comprising nanophotonics as NEMS sensors. 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS : 270-273. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/NEMS.2008.4484333" target="_blank">https://doi.org/10.1109/NEMS.2008.4484333</a> 9781424419081 http://scholarbank.nus.edu.sg/handle/10635/71770 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
MEMS Nanophotonics NEMS Sensors |
| spellingShingle |
MEMS Nanophotonics NEMS Sensors Lee, C. Thillaigovindan, J. Radhakrishnan, R. Li, J. Balasubramanian, N. Silicon beam structures comprising nanophotonics as NEMS sensors |
| description |
10.1109/NEMS.2008.4484333 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Lee, C. Thillaigovindan, J. Radhakrishnan, R. Li, J. Balasubramanian, N. |
| format |
Conference or Workshop Item |
| author |
Lee, C. Thillaigovindan, J. Radhakrishnan, R. Li, J. Balasubramanian, N. |
| author_sort |
Lee, C. |
| title |
Silicon beam structures comprising nanophotonics as NEMS sensors |
| title_short |
Silicon beam structures comprising nanophotonics as NEMS sensors |
| title_full |
Silicon beam structures comprising nanophotonics as NEMS sensors |
| title_fullStr |
Silicon beam structures comprising nanophotonics as NEMS sensors |
| title_full_unstemmed |
Silicon beam structures comprising nanophotonics as NEMS sensors |
| title_sort |
silicon beam structures comprising nanophotonics as nems sensors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71770 |
| _version_ |
1681087444267565056 |