Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Bibliographic Details
Main Authors:	Meng, L., Street, A.G., Phang, J.C.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71899
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71899
record_format	dspace
spelling	sg-nus-scholar.10635-718992015-01-07T22:18:17Z Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy Meng, L. Street, A.G. Phang, J.C.H. ELECTRICAL & COMPUTER ENGINEERING Conference Proceedings from the International Symposium for Testing and Failure Analysis 27-32 2014-06-19T03:29:06Z 2014-06-19T03:29:06Z 2009 Conference Paper Meng, L.,Street, A.G.,Phang, J.C.H. (2009). Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 27-32. ScholarBank@NUS Repository. 9781615030088 http://scholarbank.nus.edu.sg/handle/10635/71899 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Conference Proceedings from the International Symposium for Testing and Failure Analysis
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Meng, L. Street, A.G. Phang, J.C.H.
format	Conference or Workshop Item
author	Meng, L. Street, A.G. Phang, J.C.H.
spellingShingle	Meng, L. Street, A.G. Phang, J.C.H. Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
author_sort	Meng, L.
title	Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
title_short	Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
title_full	Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
title_fullStr	Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
title_full_unstemmed	Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
title_sort	subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71899
_version_	1681087467702190080

Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy

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