Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy

Subsurface imaging of multi-level integrated circuits using scanning electron acoustic microscopy

Conference Proceedings from the International Symposium for Testing and Failure Analysis

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Bibliographic Details
Main Authors: Meng, L., Street, A.G., Phang, J.C.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71899
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/71899

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