Timing performance oriented Optical proximity correction for mask cost reduction

Timing performance oriented Optical proximity correction for mask cost reduction

10.1109/ASMC.2010.5551426

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Bibliographic Details
Main Authors: Qu, Y., Teh, S.H., Heng, C.H., Tay, A., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72031
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Institution: National University of Singapore
Description
Summary:10.1109/ASMC.2010.5551426

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