Timing performance oriented Optical proximity correction for mask cost reduction

10.1109/ASMC.2010.5551426

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Bibliographic Details
Main Authors:	Qu, Y., Teh, S.H., Heng, C.H., Tay, A., Lee, T.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72031
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72031
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spelling	sg-nus-scholar.10635-720312023-10-25T21:38:16Z Timing performance oriented Optical proximity correction for mask cost reduction Qu, Y. Teh, S.H. Heng, C.H. Tay, A. Lee, T.H. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ASMC.2010.5551426 ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings 99-103 2014-06-19T03:30:39Z 2014-06-19T03:30:39Z 2010 Conference Paper Qu, Y., Teh, S.H., Heng, C.H., Tay, A., Lee, T.H. (2010). Timing performance oriented Optical proximity correction for mask cost reduction. ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings : 99-103. ScholarBank@NUS Repository. https://doi.org/10.1109/ASMC.2010.5551426 9781424465170 10788743 http://scholarbank.nus.edu.sg/handle/10635/72031 000287041300019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/ASMC.2010.5551426
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Qu, Y. Teh, S.H. Heng, C.H. Tay, A. Lee, T.H.
format	Conference or Workshop Item
author	Qu, Y. Teh, S.H. Heng, C.H. Tay, A. Lee, T.H.
spellingShingle	Qu, Y. Teh, S.H. Heng, C.H. Tay, A. Lee, T.H. Timing performance oriented Optical proximity correction for mask cost reduction
author_sort	Qu, Y.
title	Timing performance oriented Optical proximity correction for mask cost reduction
title_short	Timing performance oriented Optical proximity correction for mask cost reduction
title_full	Timing performance oriented Optical proximity correction for mask cost reduction
title_fullStr	Timing performance oriented Optical proximity correction for mask cost reduction
title_full_unstemmed	Timing performance oriented Optical proximity correction for mask cost reduction
title_sort	timing performance oriented optical proximity correction for mask cost reduction
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72031
_version_	1781783238080987136

Timing performance oriented Optical proximity correction for mask cost reduction

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