Timing performance oriented Optical proximity correction for mask cost reduction

• Main Authors: Qu, Y., Teh, S.H., Heng, C.H., Tay, A., Lee, T.H.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/72031
• Institution: National University of Singapore

10.1109/ASMC.2010.5551426