Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis

Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis

10.1117/12.280557

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Bibliographic Details
Main Authors: Osipowicz, T., Sanchez, J.L., FWatt, Kolachina, S., Ong, V.K.S., Chan, D.S.H., Phang, J.C.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Ion beam analysis
Ion microprobe
Nuclear microscopy
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72575
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Institution: National University of Singapore
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Summary:10.1117/12.280557

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