Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
10.1117/12.280557
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2014
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sg-nus-scholar.10635-725752023-10-30T21:11:23Z Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. ELECTRICAL ENGINEERING PHYSICS Ion beam analysis Ion microprobe Nuclear microscopy 10.1117/12.280557 Proceedings of SPIE - The International Society for Optical Engineering 3184 66-72 PSISD 2014-06-19T05:09:35Z 2014-06-19T05:09:35Z 1997 Conference Paper Osipowicz, T., Sanchez, J.L., FWatt, Kolachina, S., Ong, V.K.S., Chan, D.S.H., Phang, J.C.H. (1997). Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis. Proceedings of SPIE - The International Society for Optical Engineering 3184 : 66-72. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280557 0277786X http://scholarbank.nus.edu.sg/handle/10635/72575 A1997BJ51B00009 Scopus |
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Ion beam analysis Ion microprobe Nuclear microscopy |
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Ion beam analysis Ion microprobe Nuclear microscopy Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
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10.1117/12.280557 |
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ELECTRICAL ENGINEERING |
author_facet |
ELECTRICAL ENGINEERING Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. |
format |
Conference or Workshop Item |
author |
Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. |
author_sort |
Osipowicz, T. |
title |
Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
title_short |
Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
title_full |
Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
title_fullStr |
Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
title_full_unstemmed |
Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis |
title_sort |
development of the ibic (ion beam induced charge) technique for ic failure analysis |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/72575 |
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1781783262207672320 |