Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis

10.1117/12.280557

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Bibliographic Details
Main Authors:	Osipowicz, T., Sanchez, J.L., FWatt, Kolachina, S., Ong, V.K.S., Chan, D.S.H., Phang, J.C.H.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Ion beam analysis Ion microprobe Nuclear microscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72575
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72575
record_format	dspace
spelling	sg-nus-scholar.10635-725752023-10-30T21:11:23Z Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. ELECTRICAL ENGINEERING PHYSICS Ion beam analysis Ion microprobe Nuclear microscopy 10.1117/12.280557 Proceedings of SPIE - The International Society for Optical Engineering 3184 66-72 PSISD 2014-06-19T05:09:35Z 2014-06-19T05:09:35Z 1997 Conference Paper Osipowicz, T., Sanchez, J.L., FWatt, Kolachina, S., Ong, V.K.S., Chan, D.S.H., Phang, J.C.H. (1997). Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis. Proceedings of SPIE - The International Society for Optical Engineering 3184 : 66-72. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280557 0277786X http://scholarbank.nus.edu.sg/handle/10635/72575 A1997BJ51B00009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ion beam analysis Ion microprobe Nuclear microscopy
spellingShingle	Ion beam analysis Ion microprobe Nuclear microscopy Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H. Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
description	10.1117/12.280557
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H.
format	Conference or Workshop Item
author	Osipowicz, T. Sanchez, J.L. FWatt Kolachina, S. Ong, V.K.S. Chan, D.S.H. Phang, J.C.H.
author_sort	Osipowicz, T.
title	Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
title_short	Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
title_full	Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
title_fullStr	Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
title_full_unstemmed	Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis
title_sort	development of the ibic (ion beam induced charge) technique for ic failure analysis
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72575
_version_	1781783262207672320

Development of the IBIC (Ion Beam Induced Charge) technique for IC failure analysis

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