Spreading resistance profiling of ultrashallow junction NPN BJT, with carrier redistribution effect
Proceedings of SPIE - The International Society for Optical Engineering
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Main Authors: | Tan, L.C.P., Tan, L.S., Leong, M.S. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/72938 |
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Institution: | National University of Singapore |
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