A new fabrication process of silicon nanotips - NERCOM

A new fabrication process of silicon nanotips - NERCOM

10.1117/12.638516

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Bibliographic Details
Main Authors: Tay, F.E.H., Iliescu, C., Xu, G., Chen, B., Avram, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Notching effect of reflected charges on the mask (NERCOM)
RIE
Silicon nanotips
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73060
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Institution: National University of Singapore
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Summary:10.1117/12.638516

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