A new fabrication process of silicon nanotips - NERCOM

• Main Authors: Tay, F.E.H., Iliescu, C., Xu, G., Chen, B., Avram, M.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Notching effect of reflected charges on the mask (NERCOM); RIE; Silicon nanotips
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73060
• Institution: National University of Singapore

10.1117/12.638516