A new fabrication process of silicon nanotips - NERCOM

A new fabrication process of silicon nanotips - NERCOM

10.1117/12.638516

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書目詳細資料
Main Authors:	Tay, F.E.H., Iliescu, C., Xu, G., Chen, B., Avram, M.
其他作者:	MECHANICAL ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
主題:	Notching effect of reflected charges on the mask (NERCOM) RIE Silicon nanotips
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/73060
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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