A new fabrication process of silicon nanotips - NERCOM

10.1117/12.638516

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Bibliographic Details
Main Authors:	Tay, F.E.H., Iliescu, C., Xu, G., Chen, B., Avram, M.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Notching effect of reflected charges on the mask (NERCOM) RIE Silicon nanotips
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73060
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73060
record_format	dspace
spelling	sg-nus-scholar.10635-730602023-10-26T07:53:29Z A new fabrication process of silicon nanotips - NERCOM Tay, F.E.H. Iliescu, C. Xu, G. Chen, B. Avram, M. MECHANICAL ENGINEERING Notching effect of reflected charges on the mask (NERCOM) RIE Silicon nanotips 10.1117/12.638516 Progress in Biomedical Optics and Imaging - Proceedings of SPIE 6036 - 2014-06-19T05:30:42Z 2014-06-19T05:30:42Z 2006 Conference Paper Tay, F.E.H., Iliescu, C., Xu, G., Chen, B., Avram, M. (2006). A new fabrication process of silicon nanotips - NERCOM. Progress in Biomedical Optics and Imaging - Proceedings of SPIE 6036 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.638516 16057422 http://scholarbank.nus.edu.sg/handle/10635/73060 000236540300007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Notching effect of reflected charges on the mask (NERCOM) RIE Silicon nanotips
spellingShingle	Notching effect of reflected charges on the mask (NERCOM) RIE Silicon nanotips Tay, F.E.H. Iliescu, C. Xu, G. Chen, B. Avram, M. A new fabrication process of silicon nanotips - NERCOM
description	10.1117/12.638516
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, F.E.H. Iliescu, C. Xu, G. Chen, B. Avram, M.
format	Conference or Workshop Item
author	Tay, F.E.H. Iliescu, C. Xu, G. Chen, B. Avram, M.
author_sort	Tay, F.E.H.
title	A new fabrication process of silicon nanotips - NERCOM
title_short	A new fabrication process of silicon nanotips - NERCOM
title_full	A new fabrication process of silicon nanotips - NERCOM
title_fullStr	A new fabrication process of silicon nanotips - NERCOM
title_full_unstemmed	A new fabrication process of silicon nanotips - NERCOM
title_sort	new fabrication process of silicon nanotips - nercom
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73060
_version_	1781783274319773696

A new fabrication process of silicon nanotips - NERCOM

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