Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging

Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging

10.1117/12.2003972

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Bibliographic Details
Main Authors: Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diamond turning
Micro-assembly
Microelectromechanical systems
Optical coherence tomography
Resonating micro-scanners
Softlithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73419
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Institution: National University of Singapore
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Summary:10.1117/12.2003972

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