Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging

Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging

10.1117/12.2003972

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Bibliographic Details
Main Authors: Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diamond turning
Micro-assembly
Microelectromechanical systems
Optical coherence tomography
Resonating micro-scanners
Softlithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73419
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Institution: National University of Singapore
id sg-nus-scholar.10635-73419
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spelling sg-nus-scholar.10635-734192023-10-26T07:09:57Z Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging Mu, X. Zhou, G. Yu, H. Tsai, J.M.-L. Neo, W.K. Kumar, A.S. Chau, F.S. MECHANICAL ENGINEERING Diamond turning Micro-assembly Microelectromechanical systems Optical coherence tomography Resonating micro-scanners Softlithography 10.1117/12.2003972 Proceedings of SPIE - The International Society for Optical Engineering 8616 - PSISD 2014-06-19T05:34:53Z 2014-06-19T05:34:53Z 2013 Conference Paper Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S. (2013). Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging. Proceedings of SPIE - The International Society for Optical Engineering 8616 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.2003972 9780819493859 0277786X http://scholarbank.nus.edu.sg/handle/10635/73419 000329514400005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diamond turning
Micro-assembly
Microelectromechanical systems
Optical coherence tomography
Resonating micro-scanners
Softlithography
spellingShingle Diamond turning
Micro-assembly
Microelectromechanical systems
Optical coherence tomography
Resonating micro-scanners
Softlithography
Mu, X.
Zhou, G.
Yu, H.
Tsai, J.M.-L.
Neo, W.K.
Kumar, A.S.
Chau, F.S.
Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
description 10.1117/12.2003972
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Mu, X.
Zhou, G.
Yu, H.
Tsai, J.M.-L.
Neo, W.K.
Kumar, A.S.
Chau, F.S.
format Conference or Workshop Item
author Mu, X.
Zhou, G.
Yu, H.
Tsai, J.M.-L.
Neo, W.K.
Kumar, A.S.
Chau, F.S.
author_sort Mu, X.
title Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
title_short Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
title_full Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
title_fullStr Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
title_full_unstemmed Electrostatic MEMS resonating micro polygonal scanner for circumferential endoscopic bio-imaging
title_sort electrostatic mems resonating micro polygonal scanner for circumferential endoscopic bio-imaging
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73419
_version_ 1781783307182145536

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