Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror

10.1023/B:ALOG.0000032595.72995.62

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Bibliographic Details
Main Authors:	Zhou, G., Cheo, K.K.L., Tay, F.E.H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	MEMS Micromirror and macro modeling Optical MEMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73677
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73677
record_format	dspace
spelling	sg-nus-scholar.10635-736772024-11-15T03:59:14Z Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror Zhou, G. Cheo, K.K.L. Tay, F.E.H. Chau, F.S. MECHANICAL ENGINEERING MEMS Micromirror and macro modeling Optical MEMS 10.1023/B:ALOG.0000032595.72995.62 Analog Integrated Circuits and Signal Processing 40 2 141-153 AICPE 2014-06-19T05:38:01Z 2014-06-19T05:38:01Z 2004-08 Conference Paper Zhou, G., Cheo, K.K.L., Tay, F.E.H., Chau, F.S. (2004-08). Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror. Analog Integrated Circuits and Signal Processing 40 (2) : 141-153. ScholarBank@NUS Repository. https://doi.org/10.1023/B:ALOG.0000032595.72995.62 09251030 http://scholarbank.nus.edu.sg/handle/10635/73677 000222210800004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MEMS Micromirror and macro modeling Optical MEMS
spellingShingle	MEMS Micromirror and macro modeling Optical MEMS Zhou, G. Cheo, K.K.L. Tay, F.E.H. Chau, F.S. Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
description	10.1023/B:ALOG.0000032595.72995.62
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Zhou, G. Cheo, K.K.L. Tay, F.E.H. Chau, F.S.
format	Conference or Workshop Item
author	Zhou, G. Cheo, K.K.L. Tay, F.E.H. Chau, F.S.
author_sort	Zhou, G.
title	Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
title_short	Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
title_full	Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
title_fullStr	Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
title_full_unstemmed	Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
title_sort	neural network approach for linearization of the electrostatically actuated double-gimballed micromirror
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73677
_version_	1821232938246733824

Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror

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