Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror

• Main Authors: Zhou, G., Cheo, K.K.L., Tay, F.E.H., Chau, F.S.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: MEMS; Micromirror and macro modeling; Optical MEMS
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73677
• Institution: National University of Singapore

10.1023/B:ALOG.0000032595.72995.62