Non-destructive evaluation of MEMS components by optical methods

10.1117/12.839234

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Bibliographic Details
Main Authors:	Tay, C.J., Quan, C., Wang, S.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Mems Micro-beam Non-destructive evaluation Optical fibre White light interferometry
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73682
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73682
record_format	dspace
spelling	sg-nus-scholar.10635-736822015-02-25T10:06:16Z Non-destructive evaluation of MEMS components by optical methods Tay, C.J. Quan, C. Wang, S.H. MECHANICAL ENGINEERING Mems Micro-beam Non-destructive evaluation Optical fibre White light interferometry 10.1117/12.839234 Proceedings of SPIE - The International Society for Optical Engineering 7375 - PSISD 2014-06-19T05:38:04Z 2014-06-19T05:38:04Z 2009 Conference Paper Tay, C.J.,Quan, C.,Wang, S.H. (2009). Non-destructive evaluation of MEMS components by optical methods. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1117/12.839234" target="_blank">https://doi.org/10.1117/12.839234</a> 0277786X http://scholarbank.nus.edu.sg/handle/10635/73682 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Mems Micro-beam Non-destructive evaluation Optical fibre White light interferometry
spellingShingle	Mems Micro-beam Non-destructive evaluation Optical fibre White light interferometry Tay, C.J. Quan, C. Wang, S.H. Non-destructive evaluation of MEMS components by optical methods
description	10.1117/12.839234
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Quan, C. Wang, S.H.
format	Conference or Workshop Item
author	Tay, C.J. Quan, C. Wang, S.H.
author_sort	Tay, C.J.
title	Non-destructive evaluation of MEMS components by optical methods
title_short	Non-destructive evaluation of MEMS components by optical methods
title_full	Non-destructive evaluation of MEMS components by optical methods
title_fullStr	Non-destructive evaluation of MEMS components by optical methods
title_full_unstemmed	Non-destructive evaluation of MEMS components by optical methods
title_sort	non-destructive evaluation of mems components by optical methods
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73682
_version_	1681087792423108608

Non-destructive evaluation of MEMS components by optical methods

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