Optimization of spray coating photoresist for high topography surfaces

10.1109/SMICND.2005.1558739

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Bibliographic Details
Main Authors:	Lee, Y.Y., Yu, L., Tay, F.E.H., Iliescu, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	High topography surface Photoresist Spray coating
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73731
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73731
record_format	dspace
spelling	sg-nus-scholar.10635-737312015-01-31T02:28:31Z Optimization of spray coating photoresist for high topography surfaces Lee, Y.Y. Yu, L. Tay, F.E.H. Iliescu, C. MECHANICAL ENGINEERING High topography surface Photoresist Spray coating 10.1109/SMICND.2005.1558739 Proceedings of the International Semiconductor Conference, CAS 1 - 2014-06-19T05:38:41Z 2014-06-19T05:38:41Z 2005 Conference Paper Lee, Y.Y.,Yu, L.,Tay, F.E.H.,Iliescu, C. (2005). Optimization of spray coating photoresist for high topography surfaces. Proceedings of the International Semiconductor Conference, CAS 1 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SMICND.2005.1558739" target="_blank">https://doi.org/10.1109/SMICND.2005.1558739</a> 0780392140 http://scholarbank.nus.edu.sg/handle/10635/73731 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	High topography surface Photoresist Spray coating
spellingShingle	High topography surface Photoresist Spray coating Lee, Y.Y. Yu, L. Tay, F.E.H. Iliescu, C. Optimization of spray coating photoresist for high topography surfaces
description	10.1109/SMICND.2005.1558739
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Lee, Y.Y. Yu, L. Tay, F.E.H. Iliescu, C.
format	Conference or Workshop Item
author	Lee, Y.Y. Yu, L. Tay, F.E.H. Iliescu, C.
author_sort	Lee, Y.Y.
title	Optimization of spray coating photoresist for high topography surfaces
title_short	Optimization of spray coating photoresist for high topography surfaces
title_full	Optimization of spray coating photoresist for high topography surfaces
title_fullStr	Optimization of spray coating photoresist for high topography surfaces
title_full_unstemmed	Optimization of spray coating photoresist for high topography surfaces
title_sort	optimization of spray coating photoresist for high topography surfaces
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73731
_version_	1681087801182912512

Optimization of spray coating photoresist for high topography surfaces

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