Optimization of spray coating photoresist for high topography surfaces

• Main Authors: Lee, Y.Y., Yu, L., Tay, F.E.H., Iliescu, C.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: High topography surface; Photoresist; Spray coating
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73731
• Institution: National University of Singapore

10.1109/SMICND.2005.1558739