Optimization of spray coating photoresist for high topography surfaces
10.1109/SMICND.2005.1558739
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Main Authors: | Lee, Y.Y., Yu, L., Tay, F.E.H., Iliescu, C. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73731 |
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Institution: | National University of Singapore |
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