SU8 adhesive bonding using contact imprinting

SU8 adhesive bonding using contact imprinting

10.1109/SMICND.2006.283965

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Bibliographic Details
Main Authors: Yu, L., Iliescu, C., Tay, F.E.H., Chen, B.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Adhesive bonding
Contact imprinting
SU-8 photoresist
Wafer-to-wafer bonding
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73891
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Institution: National University of Singapore
id sg-nus-scholar.10635-73891
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spelling sg-nus-scholar.10635-738912015-04-18T16:41:39Z SU8 adhesive bonding using contact imprinting Yu, L. Iliescu, C. Tay, F.E.H. Chen, B. MECHANICAL ENGINEERING Adhesive bonding Contact imprinting SU-8 photoresist Wafer-to-wafer bonding 10.1109/SMICND.2006.283965 Proceedings of the International Semiconductor Conference, CAS 1 189-192 2014-06-19T05:40:35Z 2014-06-19T05:40:35Z 2007 Conference Paper Yu, L.,Iliescu, C.,Tay, F.E.H.,Chen, B. (2007). SU8 adhesive bonding using contact imprinting. Proceedings of the International Semiconductor Conference, CAS 1 : 189-192. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SMICND.2006.283965" target="_blank">https://doi.org/10.1109/SMICND.2006.283965</a> 1424401097 http://scholarbank.nus.edu.sg/handle/10635/73891 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Adhesive bonding
Contact imprinting
SU-8 photoresist
Wafer-to-wafer bonding
spellingShingle Adhesive bonding
Contact imprinting
SU-8 photoresist
Wafer-to-wafer bonding
Yu, L.
Iliescu, C.
Tay, F.E.H.
Chen, B.
SU8 adhesive bonding using contact imprinting
description 10.1109/SMICND.2006.283965
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yu, L.
Iliescu, C.
Tay, F.E.H.
Chen, B.
format Conference or Workshop Item
author Yu, L.
Iliescu, C.
Tay, F.E.H.
Chen, B.
author_sort Yu, L.
title SU8 adhesive bonding using contact imprinting
title_short SU8 adhesive bonding using contact imprinting
title_full SU8 adhesive bonding using contact imprinting
title_fullStr SU8 adhesive bonding using contact imprinting
title_full_unstemmed SU8 adhesive bonding using contact imprinting
title_sort su8 adhesive bonding using contact imprinting
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73891
_version_ 1681087830267265024

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