SU8 adhesive bonding using contact imprinting
10.1109/SMICND.2006.283965
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Main Authors: | Yu, L., Iliescu, C., Tay, F.E.H., Chen, B. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73891 |
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Institution: | National University of Singapore |
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