The study of Chromeless Phase Lithography (CPL) for 45nm lithography

The study of Chromeless Phase Lithography (CPL) for 45nm lithography

10.1117/12.685887

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Bibliographic Details
Main Authors: Soon, Y.T., Qunying, L., Cho, J.T., Chenggen, Q.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
CD
Chromeless
CPL
MEEF
Phase
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73949
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Institution: National University of Singapore
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Summary:10.1117/12.685887

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