The study of Chromeless Phase Lithography (CPL) for 45nm lithography

10.1117/12.685887

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Bibliographic Details
Main Authors:	Soon, Y.T., Qunying, L., Cho, J.T., Chenggen, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	CD Chromeless CPL MEEF Phase
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73949
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73949
record_format	dspace
spelling	sg-nus-scholar.10635-739492023-10-27T07:42:12Z The study of Chromeless Phase Lithography (CPL) for 45nm lithography Soon, Y.T. Qunying, L. Cho, J.T. Chenggen, Q. MECHANICAL ENGINEERING CD Chromeless CPL MEEF Phase 10.1117/12.685887 Proceedings of SPIE - The International Society for Optical Engineering 6349 I - PSISD 2014-06-19T05:41:18Z 2014-06-19T05:41:18Z 2006 Conference Paper Soon, Y.T., Qunying, L., Cho, J.T., Chenggen, Q. (2006). The study of Chromeless Phase Lithography (CPL) for 45nm lithography. Proceedings of SPIE - The International Society for Optical Engineering 6349 I : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.685887 0819464449 0277786X http://scholarbank.nus.edu.sg/handle/10635/73949 000243620500086 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CD Chromeless CPL MEEF Phase
spellingShingle	CD Chromeless CPL MEEF Phase Soon, Y.T. Qunying, L. Cho, J.T. Chenggen, Q. The study of Chromeless Phase Lithography (CPL) for 45nm lithography
description	10.1117/12.685887
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Soon, Y.T. Qunying, L. Cho, J.T. Chenggen, Q.
format	Conference or Workshop Item
author	Soon, Y.T. Qunying, L. Cho, J.T. Chenggen, Q.
author_sort	Soon, Y.T.
title	The study of Chromeless Phase Lithography (CPL) for 45nm lithography
title_short	The study of Chromeless Phase Lithography (CPL) for 45nm lithography
title_full	The study of Chromeless Phase Lithography (CPL) for 45nm lithography
title_fullStr	The study of Chromeless Phase Lithography (CPL) for 45nm lithography
title_full_unstemmed	The study of Chromeless Phase Lithography (CPL) for 45nm lithography
title_sort	study of chromeless phase lithography (cpl) for 45nm lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73949
_version_	1781783350362505216

The study of Chromeless Phase Lithography (CPL) for 45nm lithography

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