Analytical damage tables for crystalline silicon
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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2014
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sg-nus-scholar.10635-744872015-01-17T09:26:15Z Analytical damage tables for crystalline silicon Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. CHEMICAL & BIOMOLECULAR ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 1 463-467 JVTBD 2014-06-19T06:13:00Z 2014-06-19T06:13:00Z 2004-01 Conference Paper Chan, H.Y.,Benistant, F.,Srinivasan, M.P.,Erlebach, A.,Zechner, C. (2004-01). Analytical damage tables for crystalline silicon. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (1) : 463-467. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/74487 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. |
| format |
Conference or Workshop Item |
| author |
Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. |
| spellingShingle |
Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. Analytical damage tables for crystalline silicon |
| author_sort |
Chan, H.Y. |
| title |
Analytical damage tables for crystalline silicon |
| title_short |
Analytical damage tables for crystalline silicon |
| title_full |
Analytical damage tables for crystalline silicon |
| title_fullStr |
Analytical damage tables for crystalline silicon |
| title_full_unstemmed |
Analytical damage tables for crystalline silicon |
| title_sort |
analytical damage tables for crystalline silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/74487 |
| _version_ |
1681087938136375296 |