Analytical damage tables for crystalline silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors:	Chan, H.Y., Benistant, F., Srinivasan, M.P., Erlebach, A., Zechner, C.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/74487
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-74487
record_format	dspace
spelling	sg-nus-scholar.10635-744872024-11-10T14:01:06Z Analytical damage tables for crystalline silicon Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. CHEMICAL & BIOMOLECULAR ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 1 463-467 JVTBD 2014-06-19T06:13:00Z 2014-06-19T06:13:00Z 2004-01 Conference Paper Chan, H.Y., Benistant, F., Srinivasan, M.P., Erlebach, A., Zechner, C. (2004-01). Analytical damage tables for crystalline silicon. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (1) : 463-467. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/74487 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C.
format	Conference or Workshop Item
author	Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C.
spellingShingle	Chan, H.Y. Benistant, F. Srinivasan, M.P. Erlebach, A. Zechner, C. Analytical damage tables for crystalline silicon
author_sort	Chan, H.Y.
title	Analytical damage tables for crystalline silicon
title_short	Analytical damage tables for crystalline silicon
title_full	Analytical damage tables for crystalline silicon
title_fullStr	Analytical damage tables for crystalline silicon
title_full_unstemmed	Analytical damage tables for crystalline silicon
title_sort	analytical damage tables for crystalline silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/74487
_version_	1821215626603003904

Analytical damage tables for crystalline silicon

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