Defect engineering for ultrashallow junctions using surfaces

10.1149/1.2727421

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Bibliographic Details
Main Authors:	Seebauer, E.G., Yeong, S.H., Srinivasan, M.P., Kwok, C.T.M., Vaidyanathan, R., Colombeau, B., Chan, L.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/74536
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-74536
record_format	dspace
spelling	sg-nus-scholar.10635-745362015-02-02T11:57:17Z Defect engineering for ultrashallow junctions using surfaces Seebauer, E.G. Yeong, S.H. Srinivasan, M.P. Kwok, C.T.M. Vaidyanathan, R. Colombeau, B. Chan, L. CHEMICAL & BIOMOLECULAR ENGINEERING 10.1149/1.2727421 ECS Transactions 6 1 365-371 2014-06-19T06:13:32Z 2014-06-19T06:13:32Z 2007 Conference Paper Seebauer, E.G.,Yeong, S.H.,Srinivasan, M.P.,Kwok, C.T.M.,Vaidyanathan, R.,Colombeau, B.,Chan, L. (2007). Defect engineering for ultrashallow junctions using surfaces. ECS Transactions 6 (1) : 365-371. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.2727421" target="_blank">https://doi.org/10.1149/1.2727421</a> 9781566775502 19385862 http://scholarbank.nus.edu.sg/handle/10635/74536 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1149/1.2727421
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Seebauer, E.G. Yeong, S.H. Srinivasan, M.P. Kwok, C.T.M. Vaidyanathan, R. Colombeau, B. Chan, L.
format	Conference or Workshop Item
author	Seebauer, E.G. Yeong, S.H. Srinivasan, M.P. Kwok, C.T.M. Vaidyanathan, R. Colombeau, B. Chan, L.
spellingShingle	Seebauer, E.G. Yeong, S.H. Srinivasan, M.P. Kwok, C.T.M. Vaidyanathan, R. Colombeau, B. Chan, L. Defect engineering for ultrashallow junctions using surfaces
author_sort	Seebauer, E.G.
title	Defect engineering for ultrashallow junctions using surfaces
title_short	Defect engineering for ultrashallow junctions using surfaces
title_full	Defect engineering for ultrashallow junctions using surfaces
title_fullStr	Defect engineering for ultrashallow junctions using surfaces
title_full_unstemmed	Defect engineering for ultrashallow junctions using surfaces
title_sort	defect engineering for ultrashallow junctions using surfaces
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/74536
_version_	1681087946808098816

Defect engineering for ultrashallow junctions using surfaces

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