Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal

AIP Conference Proceedings

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Main Authors: Yeong, S.H., Colombeau, B., Benistant, F., Srinivasan, M.P., Mulcahy, C.P.A., Lee, P.S., Chan, L.
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Conference or Workshop Item
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/74713
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-747132015-02-08T11:50:29Z Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal Yeong, S.H. Colombeau, B. Benistant, F. Srinivasan, M.P. Mulcahy, C.P.A. Lee, P.S. Chan, L. CHEMICAL & BIOMOLECULAR ENGINEERING Ge-pai Halo implant Phosphorus Spacer anneal SPER Spike anneal AIP Conference Proceedings 866 58-61 2014-06-19T06:15:35Z 2014-06-19T06:15:35Z 2006 Conference Paper Yeong, S.H.,Colombeau, B.,Benistant, F.,Srinivasan, M.P.,Mulcahy, C.P.A.,Lee, P.S.,Chan, L. (2006). Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal. AIP Conference Proceedings 866 : 58-61. ScholarBank@NUS Repository. 0735403651 0094243X http://scholarbank.nus.edu.sg/handle/10635/74713 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Ge-pai
Halo implant
Phosphorus
Spacer anneal
SPER
Spike anneal
spellingShingle Ge-pai
Halo implant
Phosphorus
Spacer anneal
SPER
Spike anneal
Yeong, S.H.
Colombeau, B.
Benistant, F.
Srinivasan, M.P.
Mulcahy, C.P.A.
Lee, P.S.
Chan, L.
Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
description AIP Conference Proceedings
author2 CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet CHEMICAL & BIOMOLECULAR ENGINEERING
Yeong, S.H.
Colombeau, B.
Benistant, F.
Srinivasan, M.P.
Mulcahy, C.P.A.
Lee, P.S.
Chan, L.
format Conference or Workshop Item
author Yeong, S.H.
Colombeau, B.
Benistant, F.
Srinivasan, M.P.
Mulcahy, C.P.A.
Lee, P.S.
Chan, L.
author_sort Yeong, S.H.
title Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_short Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_full Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_fullStr Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_full_unstemmed Phosphorus implant for S/D extension formation: Diffusion and activation study after spacer and spike anneal
title_sort phosphorus implant for s/d extension formation: diffusion and activation study after spacer and spike anneal
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/74713
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