Optimisation methodology for low-g microaccelerometer
10.1117/12.404894
Saved in:
Main Authors: | Tay, F.E.H., Jun, X., Logeeswaran, V.J. |
---|---|
Other Authors: | MECHANICAL & PRODUCTION ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/75059 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
by: Chan, M.L., et al.
Published: (2014) -
Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method
by: Chan, M.L., et al.
Published: (2014) -
Differential capacitive low-g microaccelerometer with m g resolution
by: Tay, F.E.H., et al.
Published: (2014) -
Electrostatic spring effect on the dynamic performance of microresonators
by: Francis Tay, E.H., et al.
Published: (2014) -
Optimised layout generator for microgyroscope
by: Tay, F.E.H., et al.
Published: (2014)