Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

10.1016/S0925-9635(00)00398-8

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Bibliographic Details
Main Authors: Xie, X.N., Lim, R., Li, J., Lin, S.F.Y., Loh, K.P.
Other Authors: CHEMISTRY
Format: Article
Published: 2014
Subjects:
6H-Sic
Hydrogen etching
REconstructions
Reflection high energy electron diffraction
RF plasma
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75634
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Institution: National University of Singapore
Description
Summary:10.1016/S0925-9635(00)00398-8

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