Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

10.1016/S0925-9635(00)00398-8

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Main Authors:	Xie, X.N., Lim, R., Li, J., Lin, S.F.Y., Loh, K.P.
Other Authors:	CHEMISTRY
Format:	Article
Published:	2014
Subjects:	6H-Sic Hydrogen etching REconstructions Reflection high energy electron diffraction RF plasma
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/75634
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-75634
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spelling	sg-nus-scholar.10635-756342023-10-25T20:53:47Z Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration Xie, X.N. Lim, R. Li, J. Lin, S.F.Y. Loh, K.P. CHEMISTRY 6H-Sic Hydrogen etching REconstructions Reflection high energy electron diffraction RF plasma 10.1016/S0925-9635(00)00398-8 Diamond and Related Materials 10 3-7 1218-1223 DRMTE 2014-06-23T05:32:45Z 2014-06-23T05:32:45Z 2001-03 Article Xie, X.N., Lim, R., Li, J., Lin, S.F.Y., Loh, K.P. (2001-03). Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration. Diamond and Related Materials 10 (3-7) : 1218-1223. ScholarBank@NUS Repository. https://doi.org/10.1016/S0925-9635(00)00398-8 09259635 http://scholarbank.nus.edu.sg/handle/10635/75634 000168730600176 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	6H-Sic Hydrogen etching REconstructions Reflection high energy electron diffraction RF plasma
spellingShingle	6H-Sic Hydrogen etching REconstructions Reflection high energy electron diffraction RF plasma Xie, X.N. Lim, R. Li, J. Lin, S.F.Y. Loh, K.P. Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
description	10.1016/S0925-9635(00)00398-8
author2	CHEMISTRY
author_facet	CHEMISTRY Xie, X.N. Lim, R. Li, J. Lin, S.F.Y. Loh, K.P.
format	Article
author	Xie, X.N. Lim, R. Li, J. Lin, S.F.Y. Loh, K.P.
author_sort	Xie, X.N.
title	Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
title_short	Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
title_full	Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
title_fullStr	Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
title_full_unstemmed	Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration
title_sort	atomic hydrogen beam etching of carbon superstructures on 6h-sic (0001) studied by reflection high-energy election diffration
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/75634
_version_	1781783448598347776

Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

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