Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

• Main Authors: Xie, X.N., Lim, R., Li, J., Lin, S.F.Y., Loh, K.P.
• Other Authors: CHEMISTRY
• Format: Article
• Published: 2014
• Subjects: 6H-Sic; Hydrogen etching; REconstructions; Reflection high energy electron diffraction; RF plasma
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/75634
• Institution: National University of Singapore

10.1016/S0925-9635(00)00398-8