Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction

10.1116/1.1924583

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Bibliographic Details
Main Authors: Toh, S.L., Loh, K.P., Boothroyd, C.B., Li, K., Ang, C.H., Chan, L.
Other Authors: CHEMISTRY
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/77055
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Institution: National University of Singapore