Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction
10.1116/1.1924583
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2014
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sg-nus-scholar.10635-770552023-09-01T07:07:32Z Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction Toh, S.L. Loh, K.P. Boothroyd, C.B. Li, K. Ang, C.H. Chan, L. CHEMISTRY 10.1116/1.1924583 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 3 940-946 JVTBD 2014-06-23T05:50:21Z 2014-06-23T05:50:21Z 2005 Article Toh, S.L., Loh, K.P., Boothroyd, C.B., Li, K., Ang, C.H., Chan, L. (2005). Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (3) : 940-946. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1924583 10711023 http://scholarbank.nus.edu.sg/handle/10635/77055 000230479600009 Scopus |
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Asia |
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Singapore Singapore |
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10.1116/1.1924583 |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY Toh, S.L. Loh, K.P. Boothroyd, C.B. Li, K. Ang, C.H. Chan, L. |
| format |
Article |
| author |
Toh, S.L. Loh, K.P. Boothroyd, C.B. Li, K. Ang, C.H. Chan, L. |
| spellingShingle |
Toh, S.L. Loh, K.P. Boothroyd, C.B. Li, K. Ang, C.H. Chan, L. Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| author_sort |
Toh, S.L. |
| title |
Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| title_short |
Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| title_full |
Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| title_fullStr |
Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| title_full_unstemmed |
Strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| title_sort |
strain analysis in silicon substrates under uniaxial and biaxial stress by convergent beam electron diffraction |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/77055 |
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1776257745576525824 |