Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials
Materials Research Society Symposium Proceedings
Saved in:
| Main Authors: | , , , , |
|---|---|
| 其他作者: | |
| 格式: | Conference or Workshop Item |
| 出版: |
2014
|
| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/77439 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 總結: | Materials Research Society Symposium Proceedings |
|---|