Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials
Materials Research Society Symposium Proceedings
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2014
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sg-nus-scholar.10635-774392024-11-12T21:10:45Z Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials Liu, J. Wang, W.D. Wang, L. Chi, D.Z. Loh, K.P. CHEMISTRY Materials Research Society Symposium Proceedings 812 147-152 MRSPD 2014-06-23T05:55:03Z 2014-06-23T05:55:03Z 2004 Conference Paper Liu, J.,Wang, W.D.,Wang, L.,Chi, D.Z.,Loh, K.P. (2004). Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials. Materials Research Society Symposium Proceedings 812 : 147-152. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/77439 NOT_IN_WOS Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium Proceedings |
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CHEMISTRY |
| author_facet |
CHEMISTRY Liu, J. Wang, W.D. Wang, L. Chi, D.Z. Loh, K.P. |
| format |
Conference or Workshop Item |
| author |
Liu, J. Wang, W.D. Wang, L. Chi, D.Z. Loh, K.P. |
| spellingShingle |
Liu, J. Wang, W.D. Wang, L. Chi, D.Z. Loh, K.P. Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| author_sort |
Liu, J. |
| title |
Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| title_short |
Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| title_full |
Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| title_fullStr |
Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| title_full_unstemmed |
Evaluation of PECVD deposited boron nitride as copper diffusion barrier on porous low-k materials |
| title_sort |
evaluation of pecvd deposited boron nitride as copper diffusion barrier on porous low-k materials |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/77439 |
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1821234077089398784 |