Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy

Applied Physics Letters

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Main Authors:	Lau, W.S., Zhong, L., Lee, A., See, C.H., Han, T., Sandier, N.P., Chong, T.C.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80355
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-803552015-01-05T22:58:50Z Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy Lau, W.S. Zhong, L. Lee, A. See, C.H. Han, T. Sandier, N.P. Chong, T.C. ELECTRICAL ENGINEERING Applied Physics Letters 71 4 500-502 APPLA 2014-10-07T02:56:37Z 2014-10-07T02:56:37Z 1997-07-28 Article Lau, W.S.,Zhong, L.,Lee, A.,See, C.H.,Han, T.,Sandier, N.P.,Chong, T.C. (1997-07-28). Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy. Applied Physics Letters 71 (4) : 500-502. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/80355 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Applied Physics Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lau, W.S. Zhong, L. Lee, A. See, C.H. Han, T. Sandier, N.P. Chong, T.C.
format	Article
author	Lau, W.S. Zhong, L. Lee, A. See, C.H. Han, T. Sandier, N.P. Chong, T.C.
spellingShingle	Lau, W.S. Zhong, L. Lee, A. See, C.H. Han, T. Sandier, N.P. Chong, T.C. Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
author_sort	Lau, W.S.
title	Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
title_short	Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
title_full	Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
title_fullStr	Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
title_full_unstemmed	Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
title_sort	detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (ta2o5) films by zero-bias thermally stimulated current spectroscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80355
_version_	1681088872209973248

Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy

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