Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy

• Main Authors: Lau, W.S., Zhong, L., Lee, A., See, C.H., Han, T., Sandier, N.P., Chong, T.C.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/80355
• Institution: National University of Singapore

Applied Physics Letters