Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy
Applied Physics Letters
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Main Authors: | Lau, W.S., Zhong, L., Lee, A., See, C.H., Han, T., Sandier, N.P., Chong, T.C. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80355 |
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Institution: | National University of Singapore |
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