Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films
Journal of Applied Physics
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sg-nus-scholar.10635-803742024-11-09T04:03:45Z Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films Choi, W.K. Loo, F.L. Loh, F.C. Tan, K.L. ELECTRICAL ENGINEERING PHYSICS Journal of Applied Physics 80 3 1611-1616 JAPIA 2014-10-07T02:56:50Z 2014-10-07T02:56:50Z 1996-08-01 Article Choi, W.K.,Loo, F.L.,Loh, F.C.,Tan, K.L. (1996-08-01). Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films. Journal of Applied Physics 80 (3) : 1611-1616. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80374 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore Singapore |
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| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Loo, F.L. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Loo, F.L. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Loo, F.L. Loh, F.C. Tan, K.L. Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| title_short |
Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| title_full |
Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| title_fullStr |
Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| title_full_unstemmed |
Effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| title_sort |
effects of hydrogen and rf power on the structural and electrical properties of rf sputtered hydrogenated amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80374 |
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1821190040175247360 |