Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage

International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings

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Main Authors:	Cha, C.L., Chor, E.F., Gong, H., Zhang, A.Q., Dong, Z., Chan, L.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80402
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80402
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spelling	sg-nus-scholar.10635-804022024-11-14T00:58:10Z Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage Cha, C.L. Chor, E.F. Gong, H. Zhang, A.Q. Dong, Z. Chan, L. ELECTRICAL ENGINEERING MATERIALS SCIENCE International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings 49-52 243 2014-10-07T02:57:09Z 2014-10-07T02:57:09Z 1999 Article Cha, C.L.,Chor, E.F.,Gong, H.,Zhang, A.Q.,Dong, Z.,Chan, L. (1999). Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage. International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings : 49-52. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/80402 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Cha, C.L. Chor, E.F. Gong, H. Zhang, A.Q. Dong, Z. Chan, L.
format	Article
author	Cha, C.L. Chor, E.F. Gong, H. Zhang, A.Q. Dong, Z. Chan, L.
spellingShingle	Cha, C.L. Chor, E.F. Gong, H. Zhang, A.Q. Dong, Z. Chan, L. Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
author_sort	Cha, C.L.
title	Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
title_short	Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
title_full	Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
title_fullStr	Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
title_full_unstemmed	Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage
title_sort	evaluation of rapid thermal nitrided ono interpoly dielectric resistance to plasma process-induced damage
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80402
_version_	1821225361667522560

Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage

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